• For Clean, Dry Gases

• Stainless Steel Construction

• Available with or without Integral Display

• Ranges from 20 SCCM to 500 SLM Full Scale

The FMA3100/3300ST Series will precisely measure flow rates of virtually any clean, dry gas as low as 0.4 to 20 SCCM or as high as 10 to 500 SLPM, including hydrogen. Repeatable results are achieved by utilizing a thermal mass flow measurement sensor design. This proven design minimizes zero drift while maintaining fast response and linear outputs. Compression tube fittings provide fast gas connections and integrate well with existing tubing.

The FMA3200/3400ST Series flow controllers will precisely measure and control flow rates of virtually any clean, dry gas as low as 0.4 to 20 SCCM or as high as 0.2 to 10 LPM. The FMA3200/3400ST Series feature an integrated 3-digit display for flow rate monitoring right on the unit. Electrical connections are made via the included 1 m (3') cable. Either a mating cable (FMA3000C) or power adapter is required. See accessories below. The units are available with or without a display for a wide range of applications.

SPECIFICATIONS
Accuracy/Linearity:
   ±10 to 100% of rated flow: 1.5% FS
   ±20 to 100% of rated flow: 3% FS for second and third gas selection on FMA3400ST
Repeatability: ±0.25% FS
Power Requirements:
   FMA3100ST: 12 to 15 Vdc @ 100 mA
   FMA3300ST: 12 to 15 Vdc @ 150 mA
   FMA3200ST: 12 to 15 Vdc @ 230 mA
   FMA3400ST: 12 to 15 Vdc @ 250 mA
Pressure Rating: Overpressure limit is 10.2 bar (150 psig)
Operating Temperature: 0 to 55°C (32 to 131°F), non-condensing
Storage Temperature: 0 to 70°C (32 to 158°F)
Temperature Sensitivity: ±0.15% FS or less per °C
Wetted Materials: Stainless steel (303, 304, 316) and FKM O-rings
Recommended Filtration: 10 microns
Turndown Ratio: 50:1
Compatible Gases: Most clean, dry gases that are compatible with the wetted materials
Outputs: Analog voltage output 0 to 5 Vdc; voltage level is proportional to flow rate (zero Vdc at zero flow); load connected to output should not be less than 2500 Ω
Setpoint Input:
   FMA3200ST: Analog voltage input, 0 to 5 Vdc; voltage level is proportional to flow rate (0 Vdc at zero flow); input load approx 2 MΩ
   FMA3400ST: User-selectable internal or external
      External: Analog voltage input, 0 to 5 Vdc; voltage level is proportional to flow rate (zero Vdc at zero flow); input load approx 2 MΩ
      Internal: Front-panel adjustable with 2 trim pots, 1 coarse and 1 fine adjustment
Flow Connections: Stainless steel fittings
Electrical Connections: Integrated, 1 m (3'), 6-conductor cable, terminated with 6-pin male mini DIN connector (PS/2 style)
Dimensions:
   FMA3100ST: 47.4 L x 26.2 W x 90.2 mm H (1.87 x 1.03 x 3.55")
   FMA3300ST: 47.4 L x 26.2 W x 127.0 mm H (1.87 x 1.03 x 5.0")
   FMA3200ST: 80.5 L x 26.2 W x 96.5 mm H (3.17 x 1.03 x 3.80")
   FMA3400ST: 80.5 L x 26.2 W x 133.6 mm H (3.17 x 1.03 x 5.26")